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Table 2 ZEISS Crossbeam laser femtosecond laser operating parameters

From: The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber

ZEISS crossbeam laser specifications

Supplier

TRUMPF GmbH + Co. KG

Type

Diode pumped solid state fiber laser

Wavelength (λ)

515 nm (green)

Optics

telecentric, f = 100 mm

Pulse Duration

<  350 fs

Pulse repetition rate

1 kHz - 1 MHz

Max. average power

10 W @ 1 MHz

Max. pulse energy

10 μJ @ 1 MHz

Peak laser power:

max. 20 MW

Beam quality

TEM00 (M2 < 1,3)

Focus tracking length

6 mm (+/−3 mm)

Focal diameter (spot)

14 μm

Rayleigh length

150 μm

Scan field size

40 × 40 mm2