Fig. 5From: Automated measurement and analysis of sidewall roughness using three-dimensional atomic force microscopyPattern SWR measurements. a It is a 3D raw image overlaid flattened image. 3D raw image of a line constructed from 128 sequential line scans in the Y direction. b Height profiles from selected scan line of each side indicate the variation in surface roughness. c 2D plot of surface roughness based on first order flattening of line scan directionBack to article page