Fig. 1From: TEM sample preparation using micro-manipulator for in-situ MEMS experimenta Schematic configurations of manipulating system composed of optical microscopy, stage, and sourcemeter. Magnified red-squared region indicates the AAO of 20 nm pores that is put below the sample to reduce the contact area of sample and substrate. b Schematic illustrations of transferring procedure which is divided into pick-up and loading processBack to article page