Fig. 1

Schematics of the AFM-based mechanical cleaning process of a TEM sample. a Schematic illustration of the sample fabrication of graphene on a Si₃N₄ TEM grid membrane by PDMS-based stamping. b Schematic illustration of AFM-based cleaning of PDMS residue on a graphene TEM grid. c Side-view schematic of AFM-based cleaning. PDMS residues on the graphene’s top surface are removed by AFM-based scanning