Technology | Highest lateral resolution | Highest depth resolution | Scanning time |
---|---|---|---|
Infrared | 250 μm | 250 μm | 3 min |
X-ray tomography | 10 μm | >  2 μm | 30 min |
Scanning Acoustic Microscope | < 1 μm | 1 μm | 2–8 min |
Optical Microscope | 0.3 μm | 1 μm | 5 min |
Transmission Electron Microscope | 0.1 nm | 50 nm | 60 min |