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Applied Microscopy

Table 1 Milling rates for the femtosecond laser are 3 orders of magnitude faster than for a Xe + PFIB, enabling new areas of research to be explored. Rates are presented in μm3/sec [rates are empirical (this work) unless specified]

From: The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber

Material

Ga FIB

Xe Plasma FIB

fs Laser

Metal (steel)

18

6.7 × 102

2.8 × 105

Tungsten carbide

12a

1.3 x 102b

3.3 × 105

Nuclear Graphite

N/A

N/A

3.3 × 105

Silicon

1.0 × 102

6.7 × 102

5.4 × 105

  1. a - (Ali et al. 2005)
  2. b - (Burnett 2016)
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