Fig. 4From: Method of Ga removal from a specimen on a microelectromechanical system-based chip for in-situ transmission electron microscopyResult after the specimen attached to the FIB lift-out grid is subjected to Ar+ ion milling. a The TEM/HAADF-STEM images and EDS line profile of the heat-treated graphene-encapsulated TaN/Ni/Si thin-foil specimen. b The TEM/HAADF-STEM images and chemical composition of the heat-treated graphene-encapsulated TaN/Er/Si thin-foil specimenBack to article page