Fig. 2
From: Depth-dependent EBIC microscopy of radial-junction Si micropillar arrays
(a) SEM image of micropillar array and corresponding EBIC (electron beam induced current) maps at (b) 5 keV and (c) 10 keV. The relative signal uniformity suggests the presence of conformal radial junctions of individual pillars. (d) Overlay of SEM with 5 keV EBIC image confirms continuous PN junction across device. (e) Extracted EBIC line scan across pillar diameter. (f) EBIC line scans at 5 keV and 10 keV along pillar lengths demonstrate uniform signal magnitude and higher EHP generation at higher energy. Peak EBIC values occur in the pillar base region, where the cross-sectional PN junction is exposed