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Applied Microscopy
Fig. 1 | Applied Microscopy

Fig. 1

From: Depth-dependent EBIC microscopy of radial-junction Si micropillar arrays

Fig. 1

(a) Schematics illustrating a single cycle of the deep reactive-ion etching (DRIE) process. (b-d) SEM images of a pillar sidewall after (b) DRIE, (c) thermal oxidation, and (d) SiO2 removal with HF. (e) Top-view SEM image of a portion of the complete Si micropillar array. Inset displays cross-section of the device. (f) Typical I-V curve of pillar array radial junctions, showing ratifying diode behaviors. Inset plots the I-V on a log scale

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